Article

Smart ellipsometry with physics-informed deep learning

2023-08-09

Abstract excerpt

<title>Abstract</title> <p>Ellipsometry is a century-old optical measurement technique extensively used to determine thicknesses and optical constants of thin films. Nevertheless, as ellipsometry is essentially an indirect characterization method, ellipsometry data analysis, which traditionally involves tedious and time-consuming human-expert intervention and requires adequate knowledge and experience to model th...

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Literature Corpus work: 726f7900-fd99-5f83-803d-7679b631d269
DOI: 10.21203/rs.3.rs-3205511/v1

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