Article
Genetic algorithm for ellipsometric data inversion of absorbing layers.
Journal of the Optical Society of America. A, Optics, image science, and vision - 1 Jan 2000
Cormier G, Boudreau R
Abstract excerpt
A new data reduction method is presented for single-wavelength ellipsometry. A genetic algorithm is applied to ellipsometric data to find the best fit. The sample consists of a single absorbing layer on a semi-infinite substrate. The genetic algorithm has good convergence and is applicable to many different problems, including those with different independent measurements and situations with more than two angles...
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