Genetic algorithm for ellipsometric data inversion of absorbing layers.

doi:10.1364/josaa.17.000129

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Article

Genetic algorithm for ellipsometric data inversion of absorbing layers.

Journal of the Optical Society of America. A, Optics, image science, and vision - 1 Jan 2000

Cormier G, Boudreau R

Abstract excerpt

A new data reduction method is presented for single-wavelength ellipsometry. A genetic algorithm is applied to ellipsometric data to find the best fit. The sample consists of a single absorbing layer on a semi-infinite substrate. The genetic algorithm has good convergence and is applicable to many different problems, including those with different independent measurements and situations with more than two angles...

Topics

Algorithms
Biological Evolution
Computer Simulation
Genetics
Mutation
Optics and Photonics

Source

Open in PubMed

Identifiers

PMID: 10641847
DOI: 10.1364/josaa.17.000129

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PubMed metadata and Literature Corpus relationships. Corpus snapshot updated 30 Aug 2026.

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