Article
Influence of Atmospheric-Pressure Plasma Reactor Configuration on the Growth and Properties of SnO$_x$ Coatings
2026-08-12
Abstract excerpt
<title>Abstract</title> <p>Atmospheric-pressure plasma-enhanced chemical vapour deposition provides a scalable, vacuum-free route for functional metal oxide coating fabrication. In this study, SnO$_x$ coatings were deposited on glass substrates using monobutyltin trichloride (MBTC) as the precursor in three atmospheric-pressure plasma reactors: an arc-jet downstream reactor, a gliding arc reactor, and a multi-hol...
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Identifiers and source
- Literature Corpus work
- 48e089b1-3324-5f80-9c23-f88d44267f82
- DOI
- 10.21203/rs.3.rs-10498919/v1
