Uses of radio emission spectroscopy for non-contact and in situ diagnostics of low pressure radio frequency plasma processing

Abstract excerpt

We demonstrate that a passive non-contact diagnostic technique, radio emission spectroscopy (RES), provides a sensitive monitor of currents in a low pressure radio frequency (RF) plasma. A near field magnetic loop antenna was used to capture RF emissions from the plasma without perturbing it. The analysis was implemented for a capacitively coupled RF plasma with an RF supply at a frequency of 13.56 MHz. Real-time...

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Identifiers and source

Literature Corpus work

94f678aa-afee-5e96-8107-c62cf6617ff8

DOI

10.21203/rs.3.rs-678053/v1