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Article

Analysis of Mixed Composition Cold Plasmas by Optical Emission Diagnostics and Simulations

2024-11-18

Abstract excerpt

<title>Abstract</title> <p>The behavior of mixed composition cold non-equilibrium plasmas was investigated in a low-pressure capacitively coupled reactor using optical emission spectroscopy (OES). By fitting experimental data to simulations of the Second Positive System (C3 Πu-B3Πg) of N2, rotational and vibrational temperatures were determined for various Ar/N2 mixtures as a function of plasma input power (40-10...

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Literature Corpus work
73abeeb1-0856-5816-bcf8-1b0ce9285b4b
DOI
10.21203/rs.3.rs-5381776/v1
Open publication

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Analysis of Mixed Composition Cold Plasmas by Optical Emission Diagnostics and SimulationsDOI 10.21203/rs.3.rs-5381776/v1
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