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Article

Progress in Research of Flexible MEMS Microelectrodes for Neural Interface

2017-05-08

Abstract excerpt

With the rapid development of MEMS (Micro-electro-mechanical Systems) fabrication technologies, manifolds microelectrodes with various structures and functions have been designed and fabricated for applications in biomedical research, diagnosis and treatment through electrical stimulation and electrophysiological signal recording. The flexible MEMS microelectrodes exhibit multi-aspect excellent characteristics bey...

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Literature Corpus work
fc664af4-1ae7-5f9d-9787-0ffe30b10c3c
DOI
10.20944/preprints201705.0052.v1
Open publication

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